商品の詳細:
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ポンプの体積流量: | 1401L/s | 潤滑: | Maglev |
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フランジ: | ISO-F/CF 200 | 冷却: | 水 |
名前: | 水冷のmaglevの潤滑turbomolecularポンプ セリウム | キーワード: | Turbomolecularポンプ |
ハイライト: | maglevの潤滑のturbomolecularポンプ,水冷のturbomolecularポンプ,セリウムのturbomolecular真空ポンプ |
Water Cooling Maglev Lubrication Turbomolecular Pump CE
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Technologies:
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
コンタクトパーソン: sales
電話番号: +8613810212935