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商品の詳細:
お支払配送条件:
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ポンプの体積流量: | 1401L/s | 潤滑: | Maglev |
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フランジ: | ISO-F/CF 200 | 冷却: | 水 |
名前: | 5つの軸線分子ポンプ低い電力の消費 | キーワード: | Turbomolecularポンプ |
ハイライト: | 5つの軸線の分子ポンプ,低い電力の消費の分子ポンプ,ターボ分子真空ポンプ |
Water Cooling Maglev Lubrication Turbomolecular Pump CE
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Technologies:
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
コンタクトパーソン: sales
電話番号: +8613810212935