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ポンプの体積流量: | 1401L/s | 潤滑: | Maglev |
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フランジ: | ISO-F/CF 200 | 冷却: | 水 |
名前: | ターボ分子真空ポンプに抵抗する腐食は磁気的に浮揚した | キーワード: | ターボ分子ポンプ |
ハイライト: | ターボ分子真空ポンプに抵抗する腐食,磁気的に浮揚されたターボ分子真空ポンプ,turbomolecularポンプは磁気的に浮揚した |
Maglev Pump , CXF-200/1401 , Water cooling , On board
The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.
The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.
Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
コンタクトパーソン: sales
電話番号: +8613810212935