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産業1401l/S Turbomolecularの真空ポンプの上

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中国 KYKY TECHNOLOGY CO., LTD. 認証
中国 KYKY TECHNOLOGY CO., LTD. 認証
オンラインです

産業1401l/S Turbomolecularの真空ポンプの上

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大画像 :  産業1401l/S Turbomolecularの真空ポンプの上

商品の詳細:
起源の場所: 中国
ブランド名: KYKY
証明: CE
モデル番号: CXF-200/1401E
お支払配送条件:
最小注文数量: 1
パッケージの詳細: 海外向出荷のための木箱
受渡し時間: 4weeks
支払条件: T/T、L/C
詳細製品概要
ポンプの体積流量: 1401L/s 潤滑: Maglev
フランジ: ISO-F/CF 200 冷却:
名前: 1401l/s turbomolecular真空ポンプの上で産業 キーワード: turbomolecular真空ポンプ
ハイライト:

1401l/s turbomolecular真空ポンプ

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turbomolecular真空ポンプの上

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maglevの潤滑のturbomolecular真空ポンプ

Maglev Pump , CXF-200/1401 , Water cooling , On board

 

The electromagnetic bearing is also called ”active magnetic levitated bears”, consisting of a magnetic bearing, a sensor and a control system. This design has dynamic response and timely adjustment, the high-speed shafting and reliable operation.

 

The magnetically levitated molecular pumps are the pumps of which shafting is supported by virtue of magnetic force.

Series magnetically levitated molecular pumps are vacuum generation equipment developed by KYKY for meeting application requirements for fields of modern semiconductor manufacturing, chip manufacturing, industrial plating and scientific instruments.

 

 

The advantages:

 

1. Zero friction during operation, and low power consumption

2. Easy to acquire really clean high vacuum and ultrahigh vacuum without lubrication for pumps

3. Capable of extracting corrosive gases for long term

4. High safety and long service life due to protection of bearings with precision ceramic balls

5. power generating function in case of sudden power-off

 

Specifications:

Model CXF-200/1401
Pump Speed(l/s,Air) 1400
Compression Ratio >1×107
Ultimate Vacuum(Pa) ≤2×10-6
Inlet Flange DN200 ISO K(LF)
DN200 ISO F
DN200 ISO CF
Outlet Flange KF 40
Rotation Speed(rpm) 33000
Run-up Time(min) 6
VIB (mm) <0.05
Backing Pump (L/s) 15
Mounting or ientation Any
Cooling method Water
Weight(kg)(With Controller) 51

 

Applications:

 

Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.

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KYKY TECHNOLOGY CO., LTD.

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