商品の詳細:
お支払配送条件:
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ポンプの体積流量: | 1401L/s | 潤滑: | Maglev |
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フランジ: | ISO-F/CF 200 | 冷却: | 水 |
名前: | 摩擦5軸線のTurbomolecularゼロ ポンプ反腐食 | キーワード: | Turbomolecularポンプ |
ハイライト: | ゼロ摩擦turbomolecularポンプ,5つの軸線のturbomolecularポンプ,turbomolecularポンプ反腐食 |
Water Cooling Maglev Lubrication Turbomolecular Pump CE
Technologies:
Specifications:
Model | CXF-200/1401 |
Pump Speed(l/s,Air) | 1400 |
Compression Ratio | >1×107 |
Ultimate Vacuum(Pa) | ≤2×10-6 |
Inlet Flange | DN200 ISO K(LF) |
DN200 ISO F | |
DN200 ISO CF | |
Outlet Flange | KF 40 |
Rotation Speed(rpm) | 33000 |
Run-up Time(min) | 6 |
VIB (mm) | <0.05 |
Backing Pump (L/s) | 15 |
Mounting or ientation | Any |
Cooling method | Water |
Weight(kg)(With Controller) | 51 |
Applications:
Series magnetically levitated molecular pumps are mainly applied to fields of semiconductor manufacturing, clip manufacturing, industrial plating and scientific instruments, especially to extraction of corrosive gases existing in etch, CVD, PVD and ion implantation and gases easily coagulated at normal temperature.
コンタクトパーソン: sales
電話番号: +8613810212935